Andrei Isichenko

Jul 7, 2024 | nature.com | Debapam Bose |Andrei Isichenko |Kaikai Liu |Jiawei Wang |Nitesh Chauhan

AbstractHeterogeneous and monolithic integration of the versatile low-loss silicon nitride platform with low-temperature materials such as silicon electronics and photonics, III–V compound semiconductors, lithium niobate, organics, and glasses has been inhibited by the need for high-temperature annealing as well as the need for different process flows for thin and thick waveguides.