Byong Sun Chun

Aug 25, 2023 | pubs.rsc.org | Byong Sun |Byong Sun Chun |Jiyeon Jeon |Suho Park

Chip-scale short-wavelength infrared InGaAs microspectrometer based on a linear variable optical filter A miniaturized extended short-wavelength infrared (SWIR) InGaAs microspectrometer is fabricated and characterized. An In0.83Ga0.17As detector with a cutoff wavelength of 2.6 μm is successfully grown on metamorphic InAsP layers with a low surface roughness of 2.7 nm and a large strain relaxation of 96%.