Heui Jae Pahk
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1 week ago |
opg.optica.org | Heui Jae Pahk |Young Kim |Jun Lee
We present an angle-resolved channeled spectroscopic micro-ellipsometry (ACSE) system operating in a near-normal-incidence configuration with a line-scan spectrometer. The hardware covers the visible spectral range from 480 to 680 nm and provides incidence angles from 0° to 60°.
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