Kunwoo Kim

Jan 6, 2025 | mdpi.com | Kunwoo Kim

3.1. Radial Structure of the 12-Inch Chuck 1/9 ModelIn this study, the channel of a 12-inch lower chuck was structured radially, divided into nine branches, and exhibited axial symmetry. Therefore, the analysis was conducted on the 1/9 model shown in Figure 13a. The 1/9 model was equipped with six thermoelectric modules (TEMs) arranged in configurations of three, two, and one according to the flow direction from the inlet to the outlet.

Sep 16, 2024 | mdpi.com | Donghoon Kim |Kunwoo Kim |Giwoo Hyun |Jiwon Oak

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