Lucia Podhorska

Feb 13, 2024 | pericles.pericles-prod.literatumonline.com | Jessica McFadden |Graham Reid |Brian Rodriguez |Lucia Podhorska

We report on the fabrication of four different nanostructured silicon surfaces by using a combination of block copolymer micelle lithography. Nanoparticle hard masks were evaluated for their ability to produce single height nanoneedle arrays. Low-density (3 features μm-2 and high-density (201 features μm-2) single-height arrays were produced from Au or α-Fe2O3 masks respectively.

Feb 13, 2024 | onlinelibrary.wiley.com | Jessica McFadden |Graham Reid |Lucia Podhorska |Brian Rodriguez

We report on the fabrication of four different nanostructured silicon surfaces by using a combination of block copolymer micelle lithography. Nanoparticle hard masks were evaluated for their ability to produce single height nanoneedle arrays. Low-density (3 features μm-2 and high-density (201 features μm-2) single-height arrays were produced from Au or α-Fe2O3 masks respectively.