Xudong Fang

Jun 6, 2024 | mdpi.com | Xudong Fang |Jinhua Liu |Min Zhou

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Apr 3, 2023 | nature.com | Xudong Fang

AbstractMicroelectromechanical system (MEMS) pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high precision. However, they cannot easily withstand high temperatures exceeding 150 °C because of intrinsic material limits. Herein, we proposed and executed a systematic and full-process study of SiC-based MEMS pressure sensors that operate stably from −50 to 300 °C.