Zhaofeng Li

Dec 9, 2024 | mdpi.com | Ziyuan Wang |Haihong Yang |Zhaofeng Li |Jie Liu

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Feb 27, 2024 | opg.optica.org | Fuhua Yang |Xu Mao |Gang Yu |Zhaofeng Li

Extreme ultraviolet (EUV) radiation plays a key role in the fields of material science, attosecond metrology, and lithography. However, the reflective optical components typically used in EUV systems contribute to their bulky size, weight, and increased costs for fabrication. In this paper, we theoretically investigate transmissive metalens designs capable of focusing the EUV light based on the Pancharatnam–Berry phase.