Zhenghua Wang

May 11, 2023 | opg.optica.org | Zhenghua Wang |Jian Wang |Lei Yuan |Yuming Zhang

AbstractThe effects of magnesium ion implantation and post-annealing on the photoelectric performance of a $\beta {\text -} {{\rm Ga}_2}{{\rm O}_3}$-based vertical structural Schottky photodetector (PD) were thoroughly investigated. After implantation and post-annealing, the Schottky barrier height and bandgap of the ${{\rm Ga}_2}{{\rm O}_3}$ surface can be slightly increased, while the dark current is significantly reduced, and the light-to-dark current ratio is immensely improved.