Haowen Tang

Nov 20, 2023 | onlinelibrary.wiley.com | Mengmeng Guan |Jiaxuan Zhang |Haowen Tang |Qi Lu

Piezoelectric response of the ferroelectric/piezoelectric thin films is crucial for actuation of MEMS devices as well as strain-mediated electronic devices. Among many piezoelectric modes, longitudinal and transverse piezo-strain is the most widely used. Various methods have been well-established for quantitative characterization of the longitudinal piezo-strain, such as laser interferometer and piezoelectric force microscopy.

Nov 20, 2023 | pericles.pericles-prod.literatumonline.com | Jiaxuan Zhang |Haowen Tang |Qi Lu |Mengmeng Guan

Piezoelectric response of the ferroelectric/piezoelectric thin films is crucial for actuation of MEMS devices as well as strain-mediated electronic devices. Among many piezoelectric modes, longitudinal and transverse piezo-strain is the most widely used. Various methods have been well-established for quantitative characterization of the longitudinal piezo-strain, such as laser interferometer and piezoelectric force microscopy.