Katsuhiko Nishiguchi

Featured in: Favicon

scitation.org Favicon

journals.aps.org Favicon

aip.scitation.org

Articles

Subgigahertz Multilayer-Graphene Nanoelectromechanical System Integrated with a Nanometer-Scale Silicon Transistor Driven by Reflectometry

Jan 27, 2023 | link.aps.org | Katsuhiko Nishiguchi |Nippon Telegraph |Hiroshi Yamaguchi |Akira Fujiwara

Abstract We demonstrate the detection of mechanical oscillations of a nanoelectromechanical system (NEMS) composed of a multilayer-graphene (MLG) membrane by using a Si field-effect transistor (FET). The MLG membrane of 500 nm in length is suspended above multiple nanowire channels of the FET functioning as a sensor with high sensitivity.

Contact details

Emails

[email protected]

Socials & Sites

Try JournoFinder For Free

Search and contact over 1M+ journalist profiles, browse 100M+ articles, and unlock powerful PR tools.

Start Your 7-Day Free Trial →