Na-Gyeong Kang

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Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films

Aug 21, 2024 | pubs.acs.org | Na-Gyeong Kang |Min-Ji Ha |Ji-Hoon Ahn
Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films

Aug 21, 2024 | pubs.acs.org | Ji-Hoon Ahn |Na-Gyeong Kang |Min-Ji Ha

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