Tsukaho Yahagi

Mar 27, 2024 | onlinelibrary.wiley.com | Tsukaho Yahagi |Tatsuki Ohji |Hiroshi Yamaguchi |Takuma Takahashi

1 Introduction Silicon carbide (SiC) is widely used for a variety of engineering applications requiring high endurance, including structural components,[1] abrasive parts,[2] automobile parts,[3, 4] filters and porous membranes,[5, 6] combustion reactors,[7, 8] light-emitting diodes (LEDs) and microwave devices,[9] space mirrors and optical devices,[10] and power electronic devices.[11, 12] In particular, SiC semiconductors have been studied extensively for power devices, since they are...