Xinghao Huang

Aug 25, 2023 | science.org | Yun Zhu |Hideaki Yamamoto |David Elser |Xinghao Huang

MATERIALS AND METHODSThe fabrication of the origami-inspired 3D electrodes began with spin coating a sacrificial layer of polymethyl methacrylate (PMMA) on a glass slide at 3000 rpm, followed by deposition of a parylene C layer (5 μm in thickness) as the first functional layer. Deposition, patterning, and etching of a metal layer (Cr/Au, 25 nm/200 nm in thickness) defined the electrode area and the interconnects.