ZhaoXuan Li

Jan 21, 2025 | opg.optica.org | Miao Yuan |Zhen Li |Weichen Huang |ZhaoXuan Li

Scanning technology is widely used in current lithography. During scanning, any point on the wafer scanning through the field of view (FOV) is successively affected by varying levels of polarization aberrations (PAs) that depend on the position within the FOV. However, current computational lithography studies for extreme ultraviolet lithography (EUVL) neglect this effect of the “dynamic PA” caused by scanning.

Oct 31, 2024 | opg.optica.org | Miao Yuan |Zhen Li |Weichen Huang |ZhaoXuan Li

The advanced technology node has an exact error tolerance. The effectof projection objective aberration on imaging cannot be neglected. Inorder to reduce the effect of aberration, considering the centralobscuration of the high-NA extreme ultraviolet projection objective,we propose a Tatian polynomial-based annular pupil wavefrontoptimization (TBAPWO) method. An active pupil consisting of 64-termTatian polynomials is incorporated into the imaging model.

Dec 4, 2023 | mdpi.com | Yi Pan |Jie Bai |ZhaoXuan Li

1. IntroductionAt the onset of 2022, the Economic and Technological Research Institute of China Petroleum Corporation unveiled the “Development Report on the Domestic and Foreign Oil and Gas Industry”. The report highlights that in 2021, China’s investment in oil exploration and development continued to surge, resulting in sustained growth in both oil production and reserves. Crude oil production witnessed a commendable increase of over 2%, reaching an impressive 199 million tons.

Sep 1, 2023 | frontiersin.org | ZhaoXuan Li |Wenqiang Li |Lihua Li |Xiao Zhu

1 IntroductionTreatment of tissue defects caused by trauma including periodontitis (Mirzaeei, et al., 2022), exodontia (Yan et al., 2022) and tumor resection (Chen, et al., 2022) has always been an important and widely concerned topic in clinical research.